Measurement of microstructures to super resolution by focus probe
نویسندگان
چکیده
Abstract The edge detection of microstructures by microscopes is poor in resolution due to the effect of diffraction limit. This paper proposes a new technique by using the focus probe in association with a nanopositioning stage. The edge is detected by the total energy reflection principle and the step height is detected by the astigmatic principle. Both methods can realize the resolution of 1 nm. Experimental results show that for the edge detection of micro cavities and the measurement of micro linewidth, the standard deviation is less than 40 nm. For the step height measurement, the standard deviation is less than 22 nm. This novel super resolution technique is a breakthrough of the conventional diffraction limit.
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